Transformer Networks Enable Nanoscale Defect Detection at Advanced Semiconductor Nodes
Zhixuan Gao; Haoyu Deng; Ethan Marshall
- Published
- Publisher
- International Study Counselor
- Journal / collection
- Frontiers in Artificial Intelligence Research
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.71465/fair702
The original publisher provides the full text and its access options.
Cite this source
Zhixuan Gao; Haoyu Deng; Ethan Marshall. Transformer Networks Enable Nanoscale Defect Detection at Advanced Semiconductor Nodes. Frontiers in Artificial Intelligence Research. 2026-02-20. https://doi.org/10.71465/fair702