Wafer defect semantic reasoning via a three-stage retrieval-augmented system in semiconductor manufacturing
Xinting Liao; Jie Zhang; Youlong Lyu; Junliang Wang
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Journal of Manufacturing Systems
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.jmsy.2025.12.026
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Cite this source
Xinting Liao; Jie Zhang; Youlong Lyu; Junliang Wang. Wafer defect semantic reasoning via a three-stage retrieval-augmented system in semiconductor manufacturing. Journal of Manufacturing Systems. 2026-04. https://doi.org/10.1016/j.jmsy.2025.12.026