Research on Mid-to-Low Frequency Bipolar Pulsed Power Supply System for Semiconductor Surface Coatings
Xinyan Huang; Jiapeng Zheng; Zehan Wei; Zhenxing Zhao; Deyu Liu; Hui Wang
- Published
- Publisher
- IEEE
- Journal / collection
- 2026 IEEE 3rd International Conference on Electrical Power Systems and Intelligent Control (EPSIC)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/epsic70071.2026.11590484
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Cite this source
Xinyan Huang; Jiapeng Zheng; Zehan Wei; Zhenxing Zhao; Deyu Liu; Hui Wang. Research on Mid-to-Low Frequency Bipolar Pulsed Power Supply System for Semiconductor Surface Coatings. 2026 IEEE 3rd International Conference on Electrical Power Systems and Intelligent Control (EPSIC). 2026-05-22. https://doi.org/10.1109/epsic70071.2026.11590484