AI Application in Semiconductor Manufacturing: A Patent-driven Approach
Dohee Kim; Hangjung Zo
- Published
- Publisher
- Hawaii International Conference on System Sciences
- Journal / collection
- Proceedings of the Annual Hawaii International Conference on System Sciences
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.24251/hicss.2026.138
The original publisher provides the full text and its access options.
Cite this source
Dohee Kim; Hangjung Zo. AI Application in Semiconductor Manufacturing: A Patent-driven Approach. Proceedings of the Annual Hawaii International Conference on System Sciences. 2026. https://doi.org/10.24251/hicss.2026.138