Device to Circuit Co‐Design Utilizing High‐Performance PEALD Indium‐Gallium‐Zinc Oxide Thin‐Film Transistor Enabling Technology Node Scaling in Monolithic 3D Systems
Wenhui Wang; Tao Zhang; Zelin Yuan; Haoran Peng; Jun Lan; Zhixiong Li; Yongle Wu; Xuewei Feng; Longyang Lin; Feichi Zhou; Panpan Zhang; Yida Li
- Published
- Publisher
- Wiley
- Journal / collection
- Advanced Science
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1002/advs.202510551
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Cite this source
Wenhui Wang; Tao Zhang; Zelin Yuan; Haoran Peng; Jun Lan; Zhixiong Li; Yongle Wu; Xuewei Feng; Longyang Lin; Feichi Zhou; Panpan Zhang; Yida Li. Device to Circuit Co‐Design Utilizing High‐Performance PEALD Indium‐Gallium‐Zinc Oxide Thin‐Film Transistor Enabling Technology Node Scaling in Monolithic 3D Systems. Advanced Science. 2025-11-16. https://doi.org/10.1002/advs.202510551