Temporal-enhanced semiconductor yield prediction by combining equipment usage data and accumulated cycle time data
Young-Mok Bae; Chan-Young Jang; Kwang-Jae Kim
- Published
- Publisher
- Springer Science and Business Media LLC
- Journal / collection
- The International Journal of Advanced Manufacturing Technology
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1007/s00170-026-18104-7
The original publisher provides the full text and its access options.
Cite this source
Young-Mok Bae; Chan-Young Jang; Kwang-Jae Kim. Temporal-enhanced semiconductor yield prediction by combining equipment usage data and accumulated cycle time data. The International Journal of Advanced Manufacturing Technology. 2026-04-21. https://doi.org/10.1007/s00170-026-18104-7