Deep Learning for Anomaly Detection in Semiconductor Wafer Time Series Data
Thanh Lich Nguyen; Ba Hung Ngo
- Published
- Publisher
- IEEE
- Journal / collection
- 2025 Asia Meeting on Environment and Electrical Engineering (EEE-AM)
- Research area
- AI & compute
- Source type
- Conference paper
- DOI
- 10.1109/eee-am66675.2025.11473801
The original publisher provides the full text and its access options.
Cite this source
Thanh Lich Nguyen; Ba Hung Ngo. Deep Learning for Anomaly Detection in Semiconductor Wafer Time Series Data. 2025 Asia Meeting on Environment and Electrical Engineering (EEE-AM). 2025-11-05. https://doi.org/10.1109/eee-am66675.2025.11473801