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Research literature / Conference paper

Transformation: climate-aware IC manufacturing

Emily E. Gallagher; Lizzie Boakes; Cedric Rolin; Lars-Ake Ragnarsson

Published: 23 April 2025
Publisher: SPIE
Journal / collection: Optical and EUV Nanolithography XXXVIII
Research area: Industrial systems
Source type: Conference paper
DOI: 10.1117/12.3054839

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Emily E. Gallagher; Lizzie Boakes; Cedric Rolin; Lars-Ake Ragnarsson. Transformation: climate-aware IC manufacturing. Optical and EUV Nanolithography XXXVIII. 2025-04-23. https://doi.org/10.1117/12.3054839