Human-machine interface design for semiconductor gas supply control system based on proface HMI
Hui Kong; Zhifeng Jiang; Yanhui Zhao; Li Ding; Jun He
- Published
- Publisher
- SPIE
- Journal / collection
- International Conference on Advanced Semiconductors and Communications (ICASC 2025)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1117/12.3088301
The original publisher provides the full text and its access options.
Cite this source
Hui Kong; Zhifeng Jiang; Yanhui Zhao; Li Ding; Jun He. Human-machine interface design for semiconductor gas supply control system based on proface HMI. International Conference on Advanced Semiconductors and Communications (ICASC 2025). 2025-09-10. https://doi.org/10.1117/12.3088301