Infrared thermal tagging sensor for epoxy discharge measurement in semiconductor fabrication dispensers
Seok Hwan Lee; Woong Kang; Sunghyuk Im
- Published
- Publisher
- Springer Science and Business Media LLC
- Journal / collection
- Journal of Mechanical Science and Technology
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1007/s12206-026-0430-7
The original publisher provides the full text and its access options.
Cite this source
Seok Hwan Lee; Woong Kang; Sunghyuk Im. Infrared thermal tagging sensor for epoxy discharge measurement in semiconductor fabrication dispensers. Journal of Mechanical Science and Technology. 2026-05. https://doi.org/10.1007/s12206-026-0430-7