Optical metrology and simulation in 3D IC technology: TSV analysis and semiconductor doping
Saurav Gautam; Shih-Wen Chen; Chao-Ching Ho; Eugene Su; Ming-Fu Chen
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Measurement: Sensors
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.measen.2024.101596
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Cite this source
Saurav Gautam; Shih-Wen Chen; Chao-Ching Ho; Eugene Su; Ming-Fu Chen. Optical metrology and simulation in 3D IC technology: TSV analysis and semiconductor doping. Measurement: Sensors. 2025-05. https://doi.org/10.1016/j.measen.2024.101596