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Research literature / Journal article

Scheduling with constraint programming in the dynamic and stochastic environment of a semiconductor photolithography area

Patrick C. Deenen; Alp Akcay; Rick A. M. Adriaensen; Wim P. M. Nuijten; Ivo J. B. F. Adan

Published
Publisher
Springer Science and Business Media LLC
Journal / collection
Flexible Services and Manufacturing Journal
Research area
Semiconductors
Source type
Journal article
DOI
10.1007/s10696-026-09666-5

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Patrick C. Deenen; Alp Akcay; Rick A. M. Adriaensen; Wim P. M. Nuijten; Ivo J. B. F. Adan. Scheduling with constraint programming in the dynamic and stochastic environment of a semiconductor photolithography area. Flexible Services and Manufacturing Journal. 2026-05-09. https://doi.org/10.1007/s10696-026-09666-5

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