Design, simulation, and fabrication of power optimized MEMS multilayer semiconductor sensor for SO2 sensing
Pramod Shinde; Manish Ranalkar; Anjit Anjan; Rohit Patil; Rajesh Autee; Mrutyunjay Mohapatra
- Published
- Publisher
- Springer Science and Business Media LLC
- Journal / collection
- Discover Sensors
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1007/s44397-025-00009-x
The original publisher provides the full text and its access options.
Cite this source
Pramod Shinde; Manish Ranalkar; Anjit Anjan; Rohit Patil; Rajesh Autee; Mrutyunjay Mohapatra. Design, simulation, and fabrication of power optimized MEMS multilayer semiconductor sensor for SO2 sensing. Discover Sensors. 2025-06-26. https://doi.org/10.1007/s44397-025-00009-x