Space-Filling Latin Hypercube Design for Efficient Bayesian Optimization With Application to Semiconductor Development
Shigeru Kinoshita; Yuta Inoue; Tetsuro Watanabe; Kosuke Ikeda; Seiwa Nishio; Atsushi Teruya; Naoki Sakai; Takashi Goda
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Transactions on Semiconductor Manufacturing
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/tsm.2025.3574791
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Cite this source
Shigeru Kinoshita; Yuta Inoue; Tetsuro Watanabe; Kosuke Ikeda; Seiwa Nishio; Atsushi Teruya; Naoki Sakai; Takashi Goda. Space-Filling Latin Hypercube Design for Efficient Bayesian Optimization With Application to Semiconductor Development. IEEE Transactions on Semiconductor Manufacturing. 2025-08. https://doi.org/10.1109/tsm.2025.3574791