Dispense Gap Optimization for Multi-Nozzle Cleaning Defect Control in Advanced Semiconductor Processes
Xinlong Zhao; Weijie Kong; Jing Liu; Ningning Li; Xianbing Hou; Jialei Liu
- Published
- Publisher
- IEEE
- Journal / collection
- 2026 Conference of Science and technology of Integrated Circuits (CSTIC)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/cstic68613.2026.11537903
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Cite this source
Xinlong Zhao; Weijie Kong; Jing Liu; Ningning Li; Xianbing Hou; Jialei Liu. Dispense Gap Optimization for Multi-Nozzle Cleaning Defect Control in Advanced Semiconductor Processes. 2026 Conference of Science and technology of Integrated Circuits (CSTIC). 2026-03-22. https://doi.org/10.1109/cstic68613.2026.11537903