Scanning electron microscopy-based automatic defect inspection for semiconductor manufacturing: a systematic review
Enrique Dehaerne; Bappaditya Dey; Victor Blanco; Jesse Davis
- Published
- Publisher
- SPIE-Intl Soc Optical Eng
- Journal / collection
- Journal of Micro/Nanopatterning, Materials, and Metrology
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1117/1.jmm.24.2.020901
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Cite this source
Enrique Dehaerne; Bappaditya Dey; Victor Blanco; Jesse Davis. Scanning electron microscopy-based automatic defect inspection for semiconductor manufacturing: a systematic review. Journal of Micro/Nanopatterning, Materials, and Metrology. 2025-05-15. https://doi.org/10.1117/1.jmm.24.2.020901