Scalable and lightweight vision transformers for mixed-defect classification in semiconductor wafer maps
Faisal Mohammad; Junaid K. Kakar; Duksan Ryu
- Published
- Publisher
- Springer Science and Business Media LLC
- Journal / collection
- Scientific Reports
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1038/s41598-026-63752-0
The original publisher provides the full text and its access options.
Cite this source
Faisal Mohammad; Junaid K. Kakar; Duksan Ryu. Scalable and lightweight vision transformers for mixed-defect classification in semiconductor wafer maps. Scientific Reports. 2026-08-25. https://doi.org/10.1038/s41598-026-63752-0