High-Performance ZTO:F Thin-Film Transistor via Optimization of Damage-Free In-Situ F-Doping
Xuemei Yin; Wei Huang; Wei Zhong; Yayi Chen; Yi Li; Delang Lin
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Journal of the Electron Devices Society
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/jeds.2026.3701726
The original publisher provides the full text and its access options.
Cite this source
Xuemei Yin; Wei Huang; Wei Zhong; Yayi Chen; Yi Li; Delang Lin. High-Performance ZTO:F Thin-Film Transistor via Optimization of Damage-Free In-Situ F-Doping. IEEE Journal of the Electron Devices Society. 2026. https://doi.org/10.1109/jeds.2026.3701726