A double-active-layer Nb-based fabrication process for superconducting digital integrated circuits
Mingfan Chen; Shucheng Yang; Liliang Ying; Maoxiang Chen; Lijuan Li; Linxian Ma; Hui Xie; Weifeng Shi; Feng Zhou; Jie Ren
- Published
- Publisher
- IOP Publishing
- Journal / collection
- Superconductor Science and Technology
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1088/1361-6668/aeaeb2
The original publisher provides the full text and its access options.
Cite this source
Mingfan Chen; Shucheng Yang; Liliang Ying; Maoxiang Chen; Lijuan Li; Linxian Ma; Hui Xie; Weifeng Shi; Feng Zhou; Jie Ren. A double-active-layer Nb-based fabrication process for superconducting digital integrated circuits. Superconductor Science and Technology. 2026-09-30. https://doi.org/10.1088/1361-6668/aeaeb2