Introducing thermal scanning probe lithography into the nanofabrication of semiconductor quantum devices
Iker Uranga-Granados; Robin Erne; Jana Chaaban; Marta Fernandez-Regulez; Joan Bausells; Guido Rademaker; Emine Cagin; Francesc Perez-Murano
- Published
- Publisher
- SPIE
- Journal / collection
- Novel Patterning Technologies 2026
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1117/12.3089813
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Cite this source
Iker Uranga-Granados; Robin Erne; Jana Chaaban; Marta Fernandez-Regulez; Joan Bausells; Guido Rademaker; Emine Cagin; Francesc Perez-Murano. Introducing thermal scanning probe lithography into the nanofabrication of semiconductor quantum devices. Novel Patterning Technologies 2026. 2026-04-08. https://doi.org/10.1117/12.3089813