Physical-Data Hybrid Modeling in Advanced Semiconductor Manufacturing
Kai Zhang; Shuai Wang; Guangyao Zhang
- Published
- Publisher
- IEEE
- Journal / collection
- 2026 Conference of Science and technology of Integrated Circuits (CSTIC)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/cstic68613.2026.11537466
The original publisher provides the full text and its access options.
Cite this source
Kai Zhang; Shuai Wang; Guangyao Zhang. Physical-Data Hybrid Modeling in Advanced Semiconductor Manufacturing. 2026 Conference of Science and technology of Integrated Circuits (CSTIC). 2026-03-22. https://doi.org/10.1109/cstic68613.2026.11537466