High volume manufacturing innovations for metal-oxide resist patterning
Nicholas Latham; Belle Antonovich; Karen Petrillo; Joe Lee; Luciana Meli; Lior Huli; Alexandra Krawicz; Kanzo Kato; Steven Gueci; Nathan Antonovich; Steven Grzeskowiak; Jennifer Church
- Published
- Publisher
- SPIE
- Journal / collection
- Advances in Patterning Materials and Processes XLII
- Research area
- Industrial systems
- Source type
- Conference paper
- DOI
- 10.1117/12.3051567
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Cite this source
Nicholas Latham; Belle Antonovich; Karen Petrillo; Joe Lee; Luciana Meli; Lior Huli; Alexandra Krawicz; Kanzo Kato; Steven Gueci; Nathan Antonovich; Steven Grzeskowiak; Jennifer Church. High volume manufacturing innovations for metal-oxide resist patterning. Advances in Patterning Materials and Processes XLII. 2025-04-22. https://doi.org/10.1117/12.3051567