Defect Characterization through Fin and Gate Modules for Complementary Field-Effect Transistor Fabrication
Xiuju Zhou; Nachiketa Zhou Janardan; Andrea Mingardi; Ataklti Weldeslassie; Anabela Veloso; Lucas Petersen Barbosa Lima; Serge Biesemans; Kaushik Sah; Roel Gronheid; Andrew Cross
- Published
- Publisher
- The Japan Society of Applied Physics
- Journal / collection
- Extended Abstracts of the 2025 International Conference on Solid State Devices and Materials
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.7567/ssdm.2025.a-1-06
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Cite this source
Xiuju Zhou; Nachiketa Zhou Janardan; Andrea Mingardi; Ataklti Weldeslassie; Anabela Veloso; Lucas Petersen Barbosa Lima; Serge Biesemans; Kaushik Sah; Roel Gronheid; Andrew Cross. Defect Characterization through Fin and Gate Modules for Complementary Field-Effect Transistor Fabrication. Extended Abstracts of the 2025 International Conference on Solid State Devices and Materials. 2025-09-16. https://doi.org/10.7567/ssdm.2025.a-1-06