Development of a Wafer-Embeddable Microwave Patch Antenna Sensor for Plasma Diagnostics in Semiconductor Processing
Gwang-Seok Chae; Hee-Jung Yeom; Min-Young Yoon; Eun-Seok Choe; Wooram Kim; Jung-Hyung Kim; Hyo-Chang Lee
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Transactions on Instrumentation and Measurement
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/tim.2026.3693396
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Cite this source
Gwang-Seok Chae; Hee-Jung Yeom; Min-Young Yoon; Eun-Seok Choe; Wooram Kim; Jung-Hyung Kim; Hyo-Chang Lee. Development of a Wafer-Embeddable Microwave Patch Antenna Sensor for Plasma Diagnostics in Semiconductor Processing. IEEE Transactions on Instrumentation and Measurement. 2026. https://doi.org/10.1109/tim.2026.3693396