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Enhanced critical dimension metrology of semiconductor packaging via dual-band scatterometry and sequential optimization

Fu-Sheng Yang; Tan-Phuc Le; Surajit Das; Min-Ru Wu; Liang-Chia Chen

Published
Publisher
IOP Publishing
Journal / collection
Measurement Science and Technology
Research area
Semiconductors
Source type
Journal article
DOI
10.1088/1361-6501/ae7745

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Fu-Sheng Yang; Tan-Phuc Le; Surajit Das; Min-Ru Wu; Liang-Chia Chen. Enhanced critical dimension metrology of semiconductor packaging via dual-band scatterometry and sequential optimization. Measurement Science and Technology. 2026-06-12. https://doi.org/10.1088/1361-6501/ae7745

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