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Feature Selection and Predictive Modeling for Semiconductor Coating Optimization Using Chemical Vapor Deposition

Hao-Kai Tu; Chun-Wei Chen; Shu-Han Liao; Chen-Yu Lin; Jung-Hsing Wang; Wei-Jhong Chen

Published
Publisher
Springer Science and Business Media LLC
Research area
Semiconductors
Source type
Preprint / posted paper
DOI
10.21203/rs.3.rs-7070185/v1

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Hao-Kai Tu; Chun-Wei Chen; Shu-Han Liao; Chen-Yu Lin; Jung-Hsing Wang; Wei-Jhong Chen. Feature Selection and Predictive Modeling for Semiconductor Coating Optimization Using Chemical Vapor Deposition. Springer Science and Business Media LLC. 2025-07-28. https://doi.org/10.21203/rs.3.rs-7070185/v1

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