SCARF: Stage-wise Clarification-based Ambiguity-Resolving Framework for NL Control of Semiconductor Packaging Equipment
Heeyeon Joo; Jaewook Lee; Donghee Han; Mujin Kim; Keejun Han
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Transactions on Semiconductor Manufacturing
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/tsm.2026.3733702
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Cite this source
Heeyeon Joo; Jaewook Lee; Donghee Han; Mujin Kim; Keejun Han. SCARF: Stage-wise Clarification-based Ambiguity-Resolving Framework for NL Control of Semiconductor Packaging Equipment. IEEE Transactions on Semiconductor Manufacturing. 2026. https://doi.org/10.1109/tsm.2026.3733702