Synergistic enhancement of indium–zinc oxide thin-film transistor performance through CF 4 plasma treatment and laser annealing technology
Zijuan Han; Xiao Li; Chen Hua; Jisheng Pan; Fenglin Zhang; Tengbo Lv; Lei Lu
- Published
- Publisher
- IOP Publishing
- Journal / collection
- Journal of Physics D: Applied Physics
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1088/1361-6463/ae6875
The original publisher provides the full text and its access options.
Cite this source
Zijuan Han; Xiao Li; Chen Hua; Jisheng Pan; Fenglin Zhang; Tengbo Lv; Lei Lu. Synergistic enhancement of indium–zinc oxide thin-film transistor performance through CF 4 plasma treatment and laser annealing technology. Journal of Physics D: Applied Physics. 2026-05-18. https://doi.org/10.1088/1361-6463/ae6875