Transformer-encoded and Hand-crafted Feature Fusion Framework for Virtual Metrology in Semiconductor Manufacturing
Ruize Hou; Xiaoning Jin
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Procedia CIRP
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.procir.2026.03.279
The original publisher provides the full text and its access options.
Cite this source
Ruize Hou; Xiaoning Jin. Transformer-encoded and Hand-crafted Feature Fusion Framework for Virtual Metrology in Semiconductor Manufacturing. Procedia CIRP. 2026. https://doi.org/10.1016/j.procir.2026.03.279