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Research literature / Conference paper

Optimization of C2PSA Module in YOLOv11 Architecture for Semiconductor Wafer Inspection

Yankun Jian; Jun Yu; Shengjun Wen; Qiaoli Zhao; HeYu Hu; Jiahao Zhang

Published
Publisher
IEEE
Journal / collection
2025 International Conference on Advanced Mechatronic Systems (ICAMechS)
Research area
Semiconductors
Source type
Conference paper
DOI
10.1109/icamechs68051.2025.11180983

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Yankun Jian; Jun Yu; Shengjun Wen; Qiaoli Zhao; HeYu Hu; Jiahao Zhang. Optimization of C2PSA Module in YOLOv11 Architecture for Semiconductor Wafer Inspection. 2025 International Conference on Advanced Mechatronic Systems (ICAMechS). 2025-09-19. https://doi.org/10.1109/icamechs68051.2025.11180983

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