Laser-based manufacturing of silicon infrared microlenses
Tobias Brunner; Hans-Joachim Quenzer; Florian Ribbeck; Matthias Schreeb; Christian Vedder
- Published
- Publisher
- EDP Sciences
- Journal / collection
- EPJ Web of Conferences
- Research area
- Industrial systems
- Source type
- Journal article
- DOI
- 10.1051/epjconf/202638903016
The original publisher provides the full text and its access options.
Cite this source
Tobias Brunner; Hans-Joachim Quenzer; Florian Ribbeck; Matthias Schreeb; Christian Vedder. Laser-based manufacturing of silicon infrared microlenses. EPJ Web of Conferences. 2026. https://doi.org/10.1051/epjconf/202638903016