Advanced Semiconductor Failure Analysis Using In-Situ AFM in FIB-SEM
Radek Dao; Ondřej Novotný; Veronika Hegrová; Rosalinda Ring; Jan Neuman
- Published
- Publisher
- ASM International
- Journal / collection
- EDFA Technical Articles
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.31399/asm.edfa.2026-1.p011
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Cite this source
Radek Dao; Ondřej Novotný; Veronika Hegrová; Rosalinda Ring; Jan Neuman. Advanced Semiconductor Failure Analysis Using In-Situ AFM in FIB-SEM. EDFA Technical Articles. 2026-02-01. https://doi.org/10.31399/asm.edfa.2026-1.p011