Artificial Intelligence Model for Predicting Power Consumption in Semiconductor Coating Process
Jung-Hsing Wang; Chun-Wei Chen; Chen-Yu Lin
- Published
- Publisher
- MDPI
- Journal / collection
- IEEE ICEIB 2025
- Research area
- AI & compute
- Source type
- Conference paper
- DOI
- 10.3390/engproc2025108041
The original publisher provides the full text and its access options.
Cite this source
Jung-Hsing Wang; Chun-Wei Chen; Chen-Yu Lin. Artificial Intelligence Model for Predicting Power Consumption in Semiconductor Coating Process. IEEE ICEIB 2025. 2025-09-05. https://doi.org/10.3390/engproc2025108041