Airborne molecular contaminants sensors for high-yield and high-quality semiconductor manufacturing
Bum Shik Kim; Gi Baek Nam; Ho Won Jang
- Published
- Publisher
- Springer Science and Business Media LLC
- Journal / collection
- Micro and Nano Systems Letters
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1186/s40486-026-00257-5
The original publisher provides the full text and its access options.
Cite this source
Bum Shik Kim; Gi Baek Nam; Ho Won Jang. Airborne molecular contaminants sensors for high-yield and high-quality semiconductor manufacturing. Micro and Nano Systems Letters. 2026-04-02. https://doi.org/10.1186/s40486-026-00257-5