Beyond Industry 4.0: Physics-Informed Autonomous Semiconductor Manufacturing and the Emergence of AI-Native Semiconductor Enterprises
Hao Hu
- Published
- Publisher
- Elsevier BV
- Research area
- Semiconductors
- Source type
- Preprint / posted paper
- DOI
- 10.2139/ssrn.6968960
This is a preprint or other posted paper. Check the original source for its review and publication status.
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Cite this source
Hao Hu. Beyond Industry 4.0: Physics-Informed Autonomous Semiconductor Manufacturing and the Emergence of AI-Native Semiconductor Enterprises. Elsevier BV. 2026. https://doi.org/10.2139/ssrn.6968960