Advancing semiconductor manufacturing through ai-based fault detection and root cause analysis
Arifa Ahmed; Nur Mohammad; Md Abdur Rob; Jakir Hossain Ridoy; MD Samiul Hasan Aric; S M Mainul Islam; Sadia Sharmin; Nur Vanu; Mst. Rina Parvin
- Published
- Publisher
- Springer Science and Business Media LLC
- Journal / collection
- The International Journal of Advanced Manufacturing Technology
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1007/s00170-026-18777-0
The original publisher provides the full text and its access options.
Cite this source
Arifa Ahmed; Nur Mohammad; Md Abdur Rob; Jakir Hossain Ridoy; MD Samiul Hasan Aric; S M Mainul Islam; Sadia Sharmin; Nur Vanu; Mst. Rina Parvin. Advancing semiconductor manufacturing through ai-based fault detection and root cause analysis. The International Journal of Advanced Manufacturing Technology. 2026-07-22. https://doi.org/10.1007/s00170-026-18777-0