A Multi-Scale Simulation Tool for Semiconductor Fabrication Modeling
Yuqi Yang; Sisi Liu; Kai Zhang
- Published
- Publisher
- IEEE
- Journal / collection
- 2026 Conference of Science and technology of Integrated Circuits (CSTIC)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/cstic68613.2026.11537854
The original publisher provides the full text and its access options.
Cite this source
Yuqi Yang; Sisi Liu; Kai Zhang. A Multi-Scale Simulation Tool for Semiconductor Fabrication Modeling. 2026 Conference of Science and technology of Integrated Circuits (CSTIC). 2026-03-22. https://doi.org/10.1109/cstic68613.2026.11537854