Advanced SHG Metrology for Epitaxial SiGe Characterization in Semiconductor Manufacturing
Zhongming Liu; Jintai Liang; Puxi Zhou; Guangwei Xu; Shibing Long
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Transactions on Semiconductor Manufacturing
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/tsm.2026.3662500
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Cite this source
Zhongming Liu; Jintai Liang; Puxi Zhou; Guangwei Xu; Shibing Long. Advanced SHG Metrology for Epitaxial SiGe Characterization in Semiconductor Manufacturing. IEEE Transactions on Semiconductor Manufacturing. 2026-05. https://doi.org/10.1109/tsm.2026.3662500