Challenges and opportunities for semiconductor equipment facing 15th Five-Year Plan
Tianchun YE; Yu ZHU; Guoming ZHANG; Xiaoli DU; Zhenlin LEI; Pengpeng YUAN
- Published
- Publisher
- China Science Publishing & Media Ltd.
- Journal / collection
- Bulletin of Chinese Academy of Sciences
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.3724/j.issn.1000-3045.20250429001
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Cite this source
Tianchun YE; Yu ZHU; Guoming ZHANG; Xiaoli DU; Zhenlin LEI; Pengpeng YUAN. Challenges and opportunities for semiconductor equipment facing 15th Five-Year Plan. Bulletin of Chinese Academy of Sciences. 2025-05-01. https://doi.org/10.3724/j.issn.1000-3045.20250429001