AI-Based Analysis of Yield Losses and Defect Detection in Semiconductor Manufacturing
Shangwei Sun; Wutong Huang
- Published
- Publisher
- Dean & Francis Press
- Journal / collection
- Science and Technology of Engineering, Chemistry and Environmental Protection
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.61173/b1x04v83
The original publisher provides the full text and its access options.
Cite this source
Shangwei Sun; Wutong Huang. AI-Based Analysis of Yield Losses and Defect Detection in Semiconductor Manufacturing. Science and Technology of Engineering, Chemistry and Environmental Protection. 2026-02-28. https://doi.org/10.61173/b1x04v83