A matheuristic approach for semiconductor photolithography planning with machine dedication and WIP flow constraints
Min-Geol Kim; Hyunjoon Kim
- Published
- Publisher
- Informa UK Limited
- Journal / collection
- International Journal of Production Research
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1080/00207543.2026.2693092
The original publisher provides the full text and its access options.
Cite this source
Min-Geol Kim; Hyunjoon Kim. A matheuristic approach for semiconductor photolithography planning with machine dedication and WIP flow constraints. International Journal of Production Research. 2026-06-25. https://doi.org/10.1080/00207543.2026.2693092