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Research literature / Preprint / posted paper

Defect Detection of Semiconductor Wafer EB-SEM Images Based on Convolutional Neural Networks

Yuntao Liu

Published
Publisher
Springer Science and Business Media LLC
Research area
AI & compute
Source type
Preprint / posted paper
DOI
10.21203/rs.3.rs-7136028/v1

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Yuntao Liu. Defect Detection of Semiconductor Wafer EB-SEM Images Based on Convolutional Neural Networks. Springer Science and Business Media LLC. 2025-08-04. https://doi.org/10.21203/rs.3.rs-7136028/v1

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