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Impact of the gate oxide material composition on the self-heating and short channel effects in nanosheet field effect transistor

A. E. Atamuratov; D. R. Rajapov; M. M. Khalilloev; K. Sivasankaran; A. E. Abdikarimov

Published
Publisher
Springer Science and Business Media LLC
Research area
Semiconductors
Source type
Preprint / posted paper
DOI
10.21203/rs.3.rs-9499857/v1

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A. E. Atamuratov; D. R. Rajapov; M. M. Khalilloev; K. Sivasankaran; A. E. Abdikarimov. Impact of the gate oxide material composition on the self-heating and short channel effects in nanosheet field effect transistor. Springer Science and Business Media LLC. 2026-05-06. https://doi.org/10.21203/rs.3.rs-9499857/v1

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