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Research literature / Conference paper

Performance Enhancement of Nanosheet/Nanowire RF Transistor Arrays by Backside Metal Layout

Chih-Hsuan Lu; Hsin-Cheng Lin; Tao Chou; Ching-Wang Yao; C. W. Liu

Published
Publisher
IEEE
Journal / collection
2026 International VLSI Symposium on Technology, Systems and Applications (VLSI TSA)
Research area
Semiconductors
Source type
Conference paper
DOI
10.1109/vlsitsa69131.2026.11528074

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Chih-Hsuan Lu; Hsin-Cheng Lin; Tao Chou; Ching-Wang Yao; C. W. Liu. Performance Enhancement of Nanosheet/Nanowire RF Transistor Arrays by Backside Metal Layout. 2026 International VLSI Symposium on Technology, Systems and Applications (VLSI TSA). 2026-04-13. https://doi.org/10.1109/vlsitsa69131.2026.11528074

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