Mitigating the degradation of metal–semiconductor contacts with optimized electron beam evaporation
Thorben Frahm; Patrick Liebisch; Jochen Heiß; Sven Ingebrandt; Joachim Knoch
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Micro and Nano Engineering
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.mne.2026.100368
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Cite this source
Thorben Frahm; Patrick Liebisch; Jochen Heiß; Sven Ingebrandt; Joachim Knoch. Mitigating the degradation of metal–semiconductor contacts with optimized electron beam evaporation. Micro and Nano Engineering. 2026-09. https://doi.org/10.1016/j.mne.2026.100368