Process Control in Semiconductor Manufacturing Based on Deep Distributional Soft Actor-Critic Reinforcement Learning
Bangxu Liu; Dewen Zhao; Xinchun Lu; Yuhong Liu
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Transactions on Semiconductor Manufacturing
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/tsm.2025.3539223
The original publisher provides the full text and its access options.
Cite this source
Bangxu Liu; Dewen Zhao; Xinchun Lu; Yuhong Liu. Process Control in Semiconductor Manufacturing Based on Deep Distributional Soft Actor-Critic Reinforcement Learning. IEEE Transactions on Semiconductor Manufacturing. 2025-05. https://doi.org/10.1109/tsm.2025.3539223