Frequency-spatiotemporal synergistic network for high-precision semiconductor wafer dicing quality prediction
Xinyu Xie; Weifeng Cao; Jun Shi; Yangyang Hu; Hui Liang; Wanyong Liang; Xiaoliang Qian
- Published
- Publisher
- Elsevier BV
- Research area
- Semiconductors
- Source type
- Preprint / posted paper
- DOI
- 10.2139/ssrn.6379201
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Cite this source
Xinyu Xie; Weifeng Cao; Jun Shi; Yangyang Hu; Hui Liang; Wanyong Liang; Xiaoliang Qian. Frequency-spatiotemporal synergistic network for high-precision semiconductor wafer dicing quality prediction. Elsevier BV. 2026. https://doi.org/10.2139/ssrn.6379201