Metal-overlayer-assisted single-wavelength thermoreflectance imaging for microscale thermal characterization in semiconductor devices
Hee Yeon Noh; Katsumi Abe; Hyeon-Jun Lee
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Journal of Science: Advanced Materials and Devices
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.jsamd.2026.101134
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Cite this source
Hee Yeon Noh; Katsumi Abe; Hyeon-Jun Lee. Metal-overlayer-assisted single-wavelength thermoreflectance imaging for microscale thermal characterization in semiconductor devices. Journal of Science: Advanced Materials and Devices. 2026-06. https://doi.org/10.1016/j.jsamd.2026.101134