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Research literature / Conference paper

Optimization of Deposition Parameters for Thin-Film Semiconductor Structures via Spray Pyrolysis

Timur Zinchenko; Ekaterina Pecherskaya; Sergey Gurin; Maxim Novichkov; Vladimir Alexandrov; Gennadiy Kozlov

Published
Publisher
IEEE
Journal / collection
2025 IEEE 26th International Conference of Young Professionals in Electron Devices and Materials (EDM)
Research area
Semiconductors
Source type
Conference paper
DOI
10.1109/edm65517.2025.11096645

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Timur Zinchenko; Ekaterina Pecherskaya; Sergey Gurin; Maxim Novichkov; Vladimir Alexandrov; Gennadiy Kozlov. Optimization of Deposition Parameters for Thin-Film Semiconductor Structures via Spray Pyrolysis. 2025 IEEE 26th International Conference of Young Professionals in Electron Devices and Materials (EDM). 2025-06-27. https://doi.org/10.1109/edm65517.2025.11096645

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