A Novel Beam-Tilt Technique in Transmission Electron Microscopy (TEM): Application for Semiconductor Use Cases
Chu-Ping Yu; Chen Li; Chunhua (Emma) Tang; Dominique Delille; Aidan Arthur Taylor; Paola Favia; Olivier Richard; Roger Loo
- Published
- Publisher
- ASM International
- Journal / collection
- International Symposium for Testing and Failure Analysis
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.31399/asm.cp.istfa2025p0349
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Cite this source
Chu-Ping Yu; Chen Li; Chunhua (Emma) Tang; Dominique Delille; Aidan Arthur Taylor; Paola Favia; Olivier Richard; Roger Loo. A Novel Beam-Tilt Technique in Transmission Electron Microscopy (TEM): Application for Semiconductor Use Cases. International Symposium for Testing and Failure Analysis. 2025-11-16. https://doi.org/10.31399/asm.cp.istfa2025p0349